Beyond Conventional Ellipsometry: High-Resolution Mapping of Oxide Thin Films

ISE Webinar Series | 2026

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Accurate characterization of film thickness and optical properties is essential for optimizing the performance, yield, and reliability of components used in electronics, photonics, and semiconductor applications. While conventional spectroscopic ellipsometry offers high sensitivity to thin-film properties, its limited spatial resolution can make it challenging to analyze localized variations in modern micro- and nanostructured materials.

This webinar introduces Imaging Spectroscopic Ellipsometry (ISE) for high-resolution characterization of oxide thin films across various sample architectures. ISE combines spatially resolved Ψ and Δ spectra with micrometer-scale lateral resolution and nanometer-scale sensitivity to film thickness. Through pixel-wise optical modeling, ISE enables quantitative mapping of film thickness and optical properties, helping identify local non-uniformity, thickness gradients, and process-induced variations.

Join this webinar to explore how ISE provides high-resolution, non-destructive, and quantitative analysis for advanced oxide thin-film characterization in both research and manufacturing environments.

Dr. Jake Kim

A schematic of the formation of parallel stacked bilayer hBN is shown in addition to a contact potential difference map measured using sideband KPFM.

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Dr. Rocky Nguyen

OE Application Technology Team,

Park Systems Corporation

Dr. Dang Quang (Rocky) Nguyen is a Senior Application Scientist at Park Systems Corp. in Gawcheon, South Korea, with over six years of specialized experience in nanoscale characterization. He has been instrumental in implementing and optimizing advanced atomic force microscopy and imaging spectroscopic ellipsometry techniques. Rocky's work is focused on enhancing the precision of nanoscale measurements and resolving complex technical challenges to improve equipment performance and process reliability.

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Enriching your AFM data: KPFM high resolution imaging of ferroelectric domains with automated AFM

ISE Webinar Series | 2026

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