Workshop on Electrical AFM

Date: April 19th | 9:00 AM - 4:00 PM PST

Venue: Park Systems - West Coast Lab

3040 Olcott St, Santa Clara, CA, 95054

Theoretical and hands-on sessions on ScanWave^TM (Scanning Microwave Impedance Microscopy - sMIM), the most advanced electrical AFM measurement. Topics include semiconductors, insulators, buried structures, nanowires, image sensors, and emerging materials. Join this in-person workshop for a live demonstration using PrimeNano's ScanWave on a Park NX20!

Abstract: ScanWave^TM sMIM is a near-field scanning probe microscopy technique where an AFM cantilever is used as a microwave source to measure the electrical properties of materials at the nanoscale. Microwave signals are sent through an AFM cantilever and the reflected signal is collected. The reflected microwave signal is a measure of the impedance of the sample underneath the AFM tip. sMIM provides images of the variations in the local capacitance and conductance with nanoscale resolution making it an excellent method for characterizing a wide range of materials such as semiconductors, insulators, 1D/2D, ferroelectric materials and more.

Ferroelectricity is observed in hexagonal boron nitride(hBN) through control of the registry of stacked layers, which we explore through both amplitude-modulated and sideband Kelvin probe force microscopy (KPFM) on the Park FX40 automatic AFM.

A schematic of the formation of parallel stacked bilayer hBN is shown in addition to a contact potential difference map measured using sideband KPFM.

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Nicholas Antoniou

Nicholas Antoniou - PrimeNano Inc., holds a B.Sc. & M.Sc. in Electrical Engineering both from Texas A&M University. He has decades of experience in semiconductors and capital equipment product management. Nicholas started his career as a process integration and yield enhancement engineer. After 10 years in semiconductor fabrication, he joined FEI Company (now ThermoFisher) where he was director of FIB products. He was the principal FIB Engineer at Harvard University’s Center for Nanoscale Systems before returning to product management at Nova Measuring Instruments where he was managing new materials metrology systems. He is currently VP of Product and Business Development at PrimeNano. Nicholas is an active member of IEEE, EDFAS (Electronic Device Failure Analysis Society), and ASM International.

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